Data-Based Dynamic Decoupling Control for MIMO Precision Motion Stages With Position-Dependent Disturbances-Reference-Cited by-同舟云学术

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Data-Based Dynamic Decoupling Control for MIMO Precision Motion Stages With Position-Dependent Disturbances

Published:2024 Issue: Volume: Page:1-12
ISSN:1545-5955
Container-title:IEEE Transactions on Automation Science and Engineering
language:
Short-container-title:IEEE Trans. Automat. Sci. Eng.

Author:

Liu Kaixin¹,Song Fazhi²^ORCID,Dong Yue²^ORCID,Liu Yang²^ORCID,Tan Jiubin²^ORCID

Affiliation:

1. Department of Control Science and Engineering, Harbin Institute of Technology, Harbin, China

2. Ministry of Industry and Information Technology, Center of Ultra-Precision Optoelectronic Instrument Engineering and the Key Laboratory of Ultra-Precision Intelligent Instrumentation, Harbin Institute of Technology, Harbin, China

Funder

National Natural Science Foundation of China

Opening Foundation of State Key Lab of Digital Manufacturing Equipment and Technology, China

Natural Science Foundation of Heilongjiang Province

State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment

Fundamental Research Funds for the Central Universities

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx8/8856/4358066/10636115.pdf?arnumber=10636115

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