Virtual Cell-Based Scheduling Approach to Single-Robotic-Arm Cluster Tools Subject to Wafer Residency Time Constraints-Reference-Cited by-同舟云学术

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Virtual Cell-Based Scheduling Approach to Single-Robotic-Arm Cluster Tools Subject to Wafer Residency Time Constraints

Published:2024 Issue: Volume: Page:1-12
ISSN:1545-5955
Container-title:IEEE Transactions on Automation Science and Engineering
language:
Short-container-title:IEEE Trans. Automat. Sci. Eng.

Author:

Wang Jufeng¹^ORCID,Liu Chunfeng²^ORCID,Zhou MengChu³^ORCID,Abusorrah Abdullah⁴^ORCID

Affiliation:

1. Department of Data Science, China Jiliang University, Hangzhou, China

2. School of Management, Hangzhou Dianzi University, Hangzhou, China

3. Helen and John C. Hartmann Department of Electrical and Computer Engineering, New Jersey Institute of Technology, Newark, NJ, USA

4. K. A. CARE Energy Research and Innovation Center, King Abdulaziz University, Jeddah, Saudi Arabia

Funder

Humanities and Social Sciences Planned Foundation of the People’s Taiwan (PRC) Ministry of Education

Institutional Fund Projects from the Ministry of Education and King Abdulaziz University (KAU), DSR, Jeddah, Saudi Arabia

Lam Research Foundation’s Unlock Ideas Program

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx7/8856/4358066/10414011.pdf?arnumber=10414011

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