6-DoF Full Robotic Calibration Based on 1-D Interferometric Measurements for Microscale and Nanoscale Applications-Reference-Cited by-同舟云学术

6-DoF Full Robotic Calibration Based on 1-D Interferometric Measurements for Microscale and Nanoscale Applications

Published:2022-01 Issue:1 Volume:19 Page:348-359
ISSN:1545-5955
Container-title:IEEE Transactions on Automation Science and Engineering
language:
Short-container-title:IEEE Trans. Automat. Sci. Eng.

Author:

Bettahar Houari^ORCID,Lehmann Olivier^ORCID,Clevy Cedric^ORCID,Courjal Nadege,Lutz Philippe^ORCID

Funder

Franche-Comté Region

EUR Engineering and Innovation through Physical Sciences, Hightechnologies, and crossdIsciplinary research (EIPHI) Graduate School under Grant Agence Nationale de la Recherche

ANR CEPAGE

French RENATECH Network through its Franche-Comté Electronics Mechanics Thermal Science and Optics - Sciences and Technologies (FEMTO-ST) Technological Facility

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Control and Systems Engineering

Link

http://xplorestaging.ieee.org/ielx7/8856/9669994/09244582.pdf?arnumber=9244582

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