Micromachined ultrasonic transducers using silicon nitride membrane fabricated in PECVD technology

Author:

Caliano G.,Galanello F.,Caronti A.,Carotenuto R.,Pappalardo M.,Foglietti V.,Lamberti N.

Publisher

IEEE

Cited by 21 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Ultrasonic Transduction;Reference Module in Materials Science and Materials Engineering;2024

2. Effect of structural parameters on functional performance of CMUT: a simulation study and analysis;2019 14th IEEE International Conference on Electronic Measurement & Instruments (ICEMI);2019-11

3. Biasing of Capacitive Micromachined Ultrasonic Transducers;IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control;2017-02

4. Advancements on Silicon Ultrasound Probes (CMUT) for Medical Imaging Applications;Lecture Notes in Electrical Engineering;2015-08-08

5. A tethered front-plate electrode CMUT for broadband air-coupled ultrasound;2013 IEEE International Ultrasonics Symposium (IUS);2013-07

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