Finite Element Analysis of SAW Propagation Characteristics in c-plane (0001) and a-plane (11-20) AlScN Thin Films-Reference-Cited by-同舟云学术

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Finite Element Analysis of SAW Propagation Characteristics in c-plane (0001) and a-plane (11-20) AlScN Thin Films

Published:2019-10 Issue: Volume: Page:
ISSN:
Container-title:2019 IEEE International Ultrasonics Symposium (IUS)
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Author:

Feil Niclas M.¹,Kurz Nicolas¹,Urban Daniel F.²,Altayara Abdullah¹,Christian Bjoern¹,Ding Anli³,Zukauskaite Agne³,Ambacher Oliver⁴

Affiliation:

1. University of Freiburg,Department of Sustainable,Freiburg,Germany

2. Fraunhofer Institute for Mechanics of Materials IWM,Freiburg,Germany

3. Fraunhofer Institute for Applied Solid State Physics IAF,Freiburg,Germany

4. University of Freiburg,Department of Sustainable Systems Enigineering - INATECH,Freiburg,Germany

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/8914674/8925542/08925570.pdf?arnumber=8925570

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Theoretical and Experimental Study of High‐Electromechanical‐Coupling Surface Acoustic Wave Resonators Based on A‐Plane (112¯0)$\left(\right. 11 \overset{\cdot}{2} 0 \left.\right)$ Al_0.56Sc_0.44N Films;physica status solidi (RRL) – Rapid Research Letters;2024-02-27

2. High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film;Applied Physics Letters;2023-12-18

3. High-Performance SAW Resonators Based on Single-crystalline a-Plane AlN Thin Films on Sapphire Substrates;2023 IEEE International Ultrasonics Symposium (IUS);2023-09-03

4. Temperature Performance Study of SAW Sensors Based on AlN and AlScN;Micromachines;2023-05-17

5. AlN/Sapphire-Based SAW Resonators With Q Over 10000 for Temperature Sensors;IEEE Sensors Journal;2023-04-15

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