1. State Key Laboratory for Manufacturing Systems Engineering, the Electronic Materials Research Laboratory, and the Key Laboratory of the Ministry of Education, Engineering Research Center of Spin Quantum Sensor Chips, Universities of Shaanxi Province, School of Electronic Science and Engineering, Xi’an Jiaotong University, Xi’an, China
2. State Key Laboratory for Manufacturing Systems Engineering and the International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong University, Xi’an, China
3. State Key Laboratory for Manufacturing Systems Engineering, the Electronic Materials Research Laboratory, and the Key Laboratory of the Ministry of Education, Engineering Research Center of Spin Quantum Sensor Chips, Universities of Shaanxi Province, School of Electronic Science and Engineering, and the International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology, Xi’an Jiaotong University, Xi’an, China