Membrane-supported Ka band resonator employing organic micromachined packaging
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx5/6946/18685/00863580.pdf?arnumber=863580
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
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2. New release technique of a thick sacrificial layer and residue effects on novel half-coaxial transmission line filters;Journal of Micromechanics and Microengineering;2009-04-28
3. A Planar High-$Q$ Micromachined Monolithic Half-Coaxial Transmission-Line Filter;IEEE Transactions on Microwave Theory and Techniques;2006-12
4. SU-8 Ka-band filter and its microfabrication;Journal of Micromechanics and Microengineering;2005-06-17
5. Optimized SU-8 UV-lithographical process for a Ka-band filter fabrication;SPIE Proceedings;2005-04-12
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