The characteristics of tunnel oxides grown on textured silicon surface with a simple and reliable process
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Published:1999
Issue:2
Volume:46
Page:355-361
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ISSN:0018-9383
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Container-title:IEEE Transactions on Electron Devices
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language:
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Short-container-title:IEEE Trans. Electron Devices
Author:
Kow-Ming Chang ,Chii-Horng Li ,Bao-Sheng Hsieh ,Ji-Yi Yang
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials