An Efficient Integrated Scheduling Method for Twin-Cluster Tools with Buffer Space Configuration
Author:
Affiliation:
1. Jiangxi University of Science and Technology,School of Mechanical and Electrical Engineering,Ganzhou,China
2. Zhuhai IKAS Smart Technology Company,Zhuhai,China
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10318842/10318843/10319010.pdf?arnumber=10319010
Reference15 articles.
1. Petri Net-Based Optimal One-Wafer Scheduling of Single-Arm Multi-Cluster Tools in Semiconductor Manufacturing
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3. Optimal integrated schedule of entire process of dual-blade multi-cluster tools from start-up to close-down
4. Scheduling of single-arm multi-cluster tools with wafer residency time constraints in semiconductor manufacturing;zhu;IEEE Trans Semicond Manuf,2015
5. Steady-state throughput and scheduling analysis of multi-cluster tools for semiconductor manufacturing: a decomposition approach;yi;IEEE Trans Automat Sci Eng,2008
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