Test Method for Contactless On-Wafer MEMS Characterization and Production Monitoring
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Published:2016-11
Issue:11
Volume:64
Page:3918-3926
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ISSN:0018-9480
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Container-title:IEEE Transactions on Microwave Theory and Techniques
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language:
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Short-container-title:IEEE Trans. Microwave Theory Techn.
Author:
Linz SarahORCID,
Oesterle Florian,
Lindner Stefan,
Mann Sebastian,
Weigel Robert,
Koelpin Alexander
Funder
Program Mikrosystemtechnik through the Bavarian Ministry of State of Economic Affairs, Infrastructure, Traffic and Technology within the Project T-MEMS
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Radiation