CMOS-Based Sensors
Author:
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx5/10646/33608/01597652.pdf?arnumber=1597652
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Integration of Infrared Sensor and Pressure/Humidity/Temperature CMOS-MEMS Environmental Sensing Hub by Local Vacuum Packaging;2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS);2024-01-21
2. Design and Implementation of Vertically Integrated Deformable Hermetic Chambers for the Sensitivity Enhancement of CMOS-MEMS Capacitive Pressure Sensor;IEEE Sensors Journal;2022-12-15
3. MEMS Using CMOS Wafer;3D and Circuit Integration of MEMS;2021-04-23
4. MEMS capacitive pressure sensor monolithically integrated with CMOS readout circuit by using post CMOS processes;Micro and Nano Systems Letters;2017-01-09
5. Monolithic integration of capacitive sensors using a double-side CMOS MEMS post process;Journal of Micromechanics and Microengineering;2008-12-10
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