Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering
Cited by
20 articles.
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1. Laser-assisted slow tool servo diamond turning of single-crystal silicon for fabricating micro-lens arrays;Journal of Manufacturing Processes;2024-10
2. Soi Materials;Silicon-on-Insulator Technology: Materials to VLSI;2004
3. Applications;Polycrystalline Silicon for Integrated Circuits and Displays;1998
4. Isolation Technology in Monolithic Integrated Circuits: An Overview;IETE Technical Review;1994-03
5. References;Thin Films by Chemical Vapour Deposition;1990