Deep Learning-Based Multi-Horizon Forecasting for Automated Material Handling System Throughput in Semiconductor Fab

Author:

Choi Jungwoo1ORCID,Kang Hyeongwon1,Kim Jeongseob1ORCID,Choi Heejeong1ORCID,Lee Yunseung1ORCID,Kang Pilsung1ORCID

Affiliation:

1. School of Industrial and Management Engineering, Korea University, Seoul, South Korea

Funder

National Research Foundation of Korea (NRF) Grant funded by the Korea Government

Korea Institute for Advancement of Technology

Korea Government (MOTIE)

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Industrial and Manufacturing Engineering,Condensed Matter Physics,Electronic, Optical and Magnetic Materials

Reference46 articles.

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5. Temporal Fusion Transformers for interpretable multi-horizon time series forecasting

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