Author:
Sakou H.,Miyatake T.,Kashioka S.,Ejiri M.
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Cited by
8 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. Experimental constructions of binary matrices with good peak-sidelobe distances;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2016-11
2. Binary matrices of optimal autocorrelations as alignment marks;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-03
3. Scanning Probe Alloying Nanolithography;Scanning Probe Microscopy in Nanoscience and Nanotechnology;2009-12-04
4. Accurate localization of circular mark based on interpolation algorithm and modified Hough transform;2008 7th World Congress on Intelligent Control and Automation;2008
5. An auto-alignment vision system with three-axis motion control mechanism;The International Journal of Advanced Manufacturing Technology;2005-05-04