Three-axis Piezoresistive MEMS Accelerometer with Extended Twin Mass Structure
Author:
Affiliation:
1. Indian Institute of Space Science and Technology,Department of Avionics,Thiruvanathapuram,India
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/9776592/9776648/09777051.pdf?arnumber=9777051
Reference12 articles.
1. Fabrication and Characteristics of a Three-Axis Accelerometer with Double L-Shaped Beams
2. Fabrication and Characteristics of a SOI Three-Axis Acceleration Sensor Based on MEMS Technology
3. Simulation, fabrication and characterization of a three-axis piezoresistive accelerometer
4. A high-performance micromachined piezoresistive accelerometer with axially stressed tiny beams
5. Three-axis Piezoresistive Accelerometer with Uniform Axial Sensitivities
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