CMOS Scaling by Nanosheet Device Architectures and Backside Engineering
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Published:2024-04-22
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Volume:
Page:1-2
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ISSN:
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Container-title:2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA)
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language:
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Author:
Horiguchi N.1,
Mertens H.1,
Ritzenthaler R.1,
Subramanian S.1,
Weckx P.1,
Schuddinck P.1,
Veloso A.1,
Yang S.1,
Serbulova K.1,
Ryckaert J.1