Design and Characterization of a Flexure-Based Hybrid Mechanism for Precise Micro/Nano Positioning-Reference-Cited by-同舟云学术

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Design and Characterization of a Flexure-Based Hybrid Mechanism for Precise Micro/Nano Positioning

Published:2023-10-18 Issue: Volume: Page:
ISSN:
Container-title:2023 26th International Conference on Mechatronics Technology (ICMT)
language:
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Author:

Tran Kim Sang¹,Lai Kai Zhong¹,Shirinzadeh Bijan¹,Ehrampoosh Armin¹,Tian Yanling²,Zhang Dawei³,Qin Yanding³

Affiliation:

1. Robotics and Mechatronics Research Laboratory (RMRL),Department of Mechanical and Aerospace Engineering Monash University,Melbourne,Australia

2. School of Engineering University of Warwick Conventry,UK,CV47AL

3. Control and Systems Engineering Tianjin University,Tianjin,China

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/10373397/10373398/10373645.pdf?arnumber=10373645

Reference35 articles.

1. Iterative Learning Control for Video-Rate Atomic Force Microscopy

2. Design and Adaptive Terminal Sliding Mode Control of a Fast Tool Servo System for Diamond Machining of Freeform Surfaces

3. A parasitic type piezoelectric actuator with an asymmetrical flexure hinge mechanism

4. A Survey of Force-Assisted Robotic Cell Microinjection Technologies

5. Servo-hydraulic actuator in controllable canonical form: Identification and experimental validation

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