Device Design Guideline for HfO₂-Based Ferroelectric-Gated Nanoelectromechanical System
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Published:2020
Issue:
Volume:8
Page:608-613
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ISSN:2168-6734
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Container-title:IEEE Journal of the Electron Devices Society
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language:
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Short-container-title:IEEE J. Electron Devices Soc.
Author:
Yoon Chankeun,Min Jinhong,Shin Jaemin,Shin Changhwan
Funder
National Research Foundation of Korea (NRF) through a grant
Korean Government
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials,Biotechnology