Development of Ni2P Contact Technology and its integration on III-V materials for 300 mm Si Photonics Platform
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Published:2021
Issue:
Volume:
Page:1-1
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ISSN:2168-6734
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Container-title:IEEE Journal of the Electron Devices Society
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language:
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Short-container-title:IEEE J. Electron Devices Soc.
Author:
Boyer Flore,Famulok Romain,Minoret Stephane,Coudurier Nicolas,Jany Christophe,Gergaud Patrice,Rodriguez Philippe
Funder
Agence Nationale de la Recherche
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials,Biotechnology