High-Efficiency Air-Clad Type Silicon-Nitride Ring-Resonator for Bio-Sensing Applications

Author:

Atthi Nithi1,Mendez-Astudillo Manuel2,Udomsom Suruk3,Matsumoto Atsushi4,Yamwong Wittawat1,Klunngien Nipapan1,Mankong Ukrit3,Pinlaor Somchai5,Imai Kazuo6,Angkaew Tuptim7,Kanno Atsushi8,Yamamoto Naokatsu8,Kawanishi Tetsuya4,Umezawa Toshimasa8

Affiliation:

1. National Electronics and Computer Technology Center (NECTEC),Chachoengsao,Thailand

2. Ansys Inc.

3. Chiang Mai University (CMU)

4. Waseda University

5. Khon Kaen University (KKU)

6. Imai Engineering

7. Chulalongkorn University (CU)

8. National Institute of Information and Communications Technology (NICT)

Publisher

IEEE

Reference7 articles.

1. Trimming lithography: The alternative technology for sub-resolution and sub-wavelength patterning;atthi;ECTI Trans Electr Eng Electron Commun,2012

2. Nonduplicate Polarization-Diversity 32 × 32 Silicon Photonics Switch Based on a SiN/Si Double-Layer Platform

3. Silicon photonic resonator for label-free bio-sensing application;udomsom;Proc Int Conf on Photonics Solution,2017

4. Silicon photonic resonator for sensitive bio-sensing applications;mankong;Proc Photonics-appl Electromagnetic Meas (PEM) conf in IEICE,2017

5. Detection of S100 calcium binding protein A6 by silicon nitride photonic sensor;udomsom;Proc iEECON,2022

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