Miniaturized and Highly Integrated Humidity Sensor with Biocompatible Sensing Material for Smart Farming-Reference-Cited by-同舟云学术

Miniaturized and Highly Integrated Humidity Sensor with Biocompatible Sensing Material for Smart Farming

Published:2022-04-27 Issue: Volume: Page:
ISSN:
Container-title:2022 Smart Systems Integration (SSI)
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Author:

Schlagmann Moritz¹,Selbmann Franz²,Haubold Marco¹,Vobl Matthias¹,Otto Thomas³

Affiliation:

1. Infineon Technologies AG,Neubiberg,Germany

2. Fraunhofer ENAS,Chemnitz,Germany

3. Technische Universität Chemnitz,Center for Microtechnologies,Chemnitz,Germany

Funder

Bundesministerium für Bildung und Forschung

Publisher

IEEE

Link

http://xplorestaging.ieee.org/ielx7/9901388/9901406/09901427.pdf?arnumber=9901427

Reference16 articles.

1. Low-Cost Parylene Based Micro Humidity Sensor for Integrated Human Thermal Comfort Sensing;wang;2020 IEEE 15th International Conference on Nano/Micro Engineered & Molecular Systems,2020

2. Experimental Study of Parylene Based Capacitive Humidity Sensor for Integrated Thermal Comfort Sensing Application;tavakkoli;IEEE Sens Lett,2021

3. Single-Chip Integration of CMOS Compatible Mems Temperature/Humidity and Highly Sensitive Flow Sensors for Human Thermal Comfort Sensing Application;2021 21st International Conference on Solid-State Sensors Actuators and Microsystems (Transducers),2021

4. Dependence of water sorption in polyimides on the internal linkage in the diamine component

5. Developments of Thin-Film Temperature and Humidity Sensors for PEMFC In-Situ Measurements

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