Effect of Silicon Substrate Roughness on Silver-Based Backside Metallization for Power Electronics Packaging
Author:
Affiliation:
1. Silicon Austria Labs,Villach,Austria
Publisher
IEEE
Link
http://xplorestaging.ieee.org/ielx7/10168303/10168312/10168377.pdf?arnumber=10168377
Reference17 articles.
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3. Ultrathin Wafer Pre-Assembly and Assembly Process Technologies: A Review
4. High speed silicon wet anisotropic etching for applications in bulk micromachining: a review
5. Auger electron spectroscopy characterization of Ti/NiV/Ag multilayer back-metal for monitoring of Ni migration on Ag surface;ricciari;Microelectronics Reliability 55 9-10,2015
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