Learning Control for Motion Coordination in Wafer Scanners: Toward Gain Adaptation-Reference-Cited by-同舟云学术

Learning Control for Motion Coordination in Wafer Scanners: Toward Gain Adaptation

Published:2022-12 Issue:12 Volume:69 Page:13428-13438
ISSN:0278-0046
Container-title:IEEE Transactions on Industrial Electronics
language:
Short-container-title:IEEE Trans. Ind. Electron.

Author:

Song Fazhi¹^ORCID,Liu Yang¹^ORCID,Shen Dong²^ORCID,Li Li¹,Tan Jiubin¹^ORCID

Affiliation:

1. Center of Ultra-Precision Optoelectronic Instrument Engineering and Key Lab of Ultra-Precision Intelligent Instrumentation, Ministry of Industry and Information Technology, Harbin Institute of Technology, Harbin, China

2. School of Mathematics, Renmin University of China, Beijing, China

Funder

National Natural Science Foundation of China

China Postdoctoral Science Foundation

Heilongjiang Provincial Postdoctoral Science Foundation

State Key Lab of Digital Manufacturing Equipment and Technology

Huazhong University of Science and Technology

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Subject

Electrical and Electronic Engineering,Control and Systems Engineering

Link

http://xplorestaging.ieee.org/ielx7/41/9970766/09691260.pdf?arnumber=9691260

Reference39 articles.

1. Phase-lead ILC based electrode array stimulation using reduced input subspace

2. On inversion-based approaches for feedforward and ILC

3. Data-Driven Iterative Learning Control for Nonlinear Discrete-Time MIMO Systems

4. Global Iterative Sliding Mode Control of an Industrial Biaxial Gantry System for Contouring Motion Tasks

5. Advanced GTCF-LARC Contouring Motion Controller Design for an Industrial X–Y Linear Motor Stage With Experimental Investigation

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