A MEMS-Based Three-Ring Capacitive Angular Position Sensor With an Absolute Zero Position Feature-Reference-Cited by-同舟云学术

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A MEMS-Based Three-Ring Capacitive Angular Position Sensor With an Absolute Zero Position Feature

Published:2024 Issue: Volume: Page:1-11
ISSN:0278-0046
Container-title:IEEE Transactions on Industrial Electronics
language:
Short-container-title:IEEE Trans. Ind. Electron.

Author:

Xie Jinxuan¹^ORCID,Zhou Tong¹^ORCID,Li Xiaoshi²^ORCID,Chen Yu²^ORCID,Yang Tianyu²^ORCID,Su Yan¹^ORCID

Affiliation:

1. Jiangsu Research Center for Intelligent Navigation and Control of Complex Motion, School of Mechanical Engineering, Nanjing University of Science and Technology, Nanjing, China

2. Microsystem and Terahertz Research Center, China Academy of Engineering Physics, Chengdu, China

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Link

http://xplorestaging.ieee.org/ielx8/41/4387790/10583939.pdf?arnumber=10583939

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