Nanosize relief: from phase masks to antireflection coatings on quartz and silicon
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Published:2008-11-30
Issue:11
Volume:38
Page:1078-1082
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ISSN:1063-7818
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Container-title:Quantum Electronics
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language:
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Short-container-title:Quantum Electron.
Author:
Verevkin Yu K,Klimov A Yu,Gribkov B A,Petryakov V N,Koposova E V,Olaizola Santiago M
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Statistical and Nonlinear Physics,Electronic, Optical and Magnetic Materials