1. Reticle Electrostatic Protection Seminar, International Sematech
2. Controlling ESD In Automated Handling Equipment
3. Design of Semiconductor Manufacturing Equipment for Electrostatic Compatibility
4. Mechanical specification for a 150 mm reticle SMIF pod (RSP150) used to transport and store a 6 inch reticle. SEMI Standard E111. Available
5. A Study of the Mechanisms for ESD Damage to Reticles;Montoya J, Levit L, Englisch A;IEEE T Electron Pack