EFFECTIVENESS OF MAGNETIC FIELD PERPENDICULAR TO Co-Cr TARGET IN TP TYPE SPUTTERING
Author:
Affiliation:
1. Faculty of Engineering, Toyama University
2. Dept. of Management & Computer, Nanao Junior College
3. Faculty of Engineering, Tokyo Institute of Technology
Publisher
The Magnetics Society of Japan
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Link
https://www.jstage.jst.go.jp/article/jmsjmag/15/S_2_PMRC_91/15_S_2_PMRC_91_S2_921/_pdf
Reference6 articles.
1. [1] Y. Niimura, S. Nakagawa & M. Naoe : IEEE Trans. on Magn., MAG-22, 5 (1986) pp. 1164-1166.
2. [2] T. Takahashi & M. Naoe : IEEE Trans. on Magn., 25, 5 (1989) pp. 4174-4176.
3. [3] T. Takahashi, N. Ikeda & M. Naoe : IEEE Trans. on Magn., 26, 5 (1990) pp. 1611-1613.
4. [4] M. Sagoi : Doctoral Thesis (Tokyo Institute of Technology), (1990) p.10.
5. [5] T. Takahashi, T. Hata & M. Naoe : IEEE Trans. on Magn., 26, 1 (1990) pp. 112-114.
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