Induced defects in a-Si:H/a-SiNx:H multilayers by use of EMT and PAT
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Published:1998-05
Issue:5
Volume:23
Page:991-997
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ISSN:0749-6036
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Container-title:Superlattices and Microstructures
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language:en
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Short-container-title:Superlattices and Microstructures
Author:
Gu W.Z.,Wang Z.C.,Sun M.X.
Subject
Electrical and Electronic Engineering,Condensed Matter Physics,General Materials Science