Vibrational Temperature Estimation of Nitrogen Molecules in Radio-Frequency (RF) Produced Plasma
Author:
Affiliation:
1. Institute of Science, Nirma University
2. Shri Vaishnav Vidhyapeeth Vishwavidyalaya
3. Institute for Plasma Research
4. Institute of Technology, Nirma University
Publisher
Japan Society of Plasma Science and Nuclear Fusion Research
Subject
Condensed Matter Physics
Link
https://www.jstage.jst.go.jp/article/pfr/17/0/17_2401095/_pdf
Reference16 articles.
1. [1] M.A. Lieberman and A.J. Lichtenberg, Principles of plasma discharges and materials processing (John Wiley & Sons, 2005).
2. [2] V. Philipps et al., Phys. Scr. T145, 52 (2011).
3. [3] S. Mathur and P. Kuhn, Surf. Coat. Technol. 201, 806 (2006).
4. [4] S.-H. Hong et al., Fusion Sci. Technol. 68, 36 (2015).
5. [5] R.L. Tanna et al., Nucl. Fusion 57, 102008 (2017).
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