Author:
Chung Seungjun,Kwon Hyuk-Jun,Jang Jaewon
Abstract
We investigate the mechanical and electrical reliability of inkjet-printed
4-terminal (4T) microelectromechanical (MEM) relays in various failure modes.
Since an inkjet-printed mechanical relay exhibits an extremely low on-resistance
(~4 Ω), the endurance of MEM relays can be limited dominantly by Joule
heating from the high current density at the contacting asperities, which
eventually leads to welding-induced and electromigration failures. Therefore,
high drain-source voltage can reduce the mean number of cycles to failure
(MCTF). In addition, the endurance also depends on the structural fatigue of the
floated beams, where the mechanical strain is concentrated near the junction
area of the two floated beams. Thermal and mechanical stress distributions of
the suggested printed 4T MEM relay are analyzed by 3-dimensional affected
significantly by charging of the dielectric or oxidation of the contacting
surface which can degrade a pull-in voltage and on-current, respectively.
Funder
National Research Foundation of Korea
Publisher
Korea Flexible & Printed Electronics Society