RADIATION-ACOUSTIC EFFECTS AT DIAMOND-LIKE COATING DEPOSITION FROM THE FLOW OF HYDROCARBON IONS AND THEIR INFLUENCE ON KINETIC PROCESSES

Author:

Kalinichenko O.I.,Strel’nitskij V.E.

Abstract

Based on the model of the nonlocal thermoelastic peak (NTP) the ion generalized to the case of the ion of polyatomic molecule, the acoustic effect of low-energy ion of a hydrocarbon molecule during plasma-ion deposition of diamond-like carbon coating is investigated. The generation of a stress wave takes place as a result of the combined action of mechanisms associated with the rapid transfer of energy, momentum, and additional volume to the NTP volume. The magnitude, shape, and spatial dependence of the stress pulse generated by CH4, C2H2, and C6H6 ions have been studied with absorption taken into account. The possibility of accelerating the diffusion of interstitial defects, as well as the possibility of brittle fracture of the coating at the interface with the substrate under the action of acoustic pulses from deposited hydrocarbon ions, is discussed.

Publisher

Problems of Atomic Science and Technology

Subject

Pharmacology (medical),General Medicine,General Medicine,General Engineering,General Medicine,Management of Technology and Innovation,General Materials Science,General Medicine,General Medicine,General Engineering

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. RADIATION-STIMULATED DIFFUSION IN PLASMA-ION DEPOSITION OF COATINGS;Problems of Atomic Science and Technology;2024-01-29

2. INTRINSIC STRESS IN CARBON COATINGS DEPOSITED FROM HYDROCARBON ION FLOW;Problems of Atomic Science and Technology;2024-01-29

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