Effects of Growth Ambient, Process Pressure, and Heat Treatments on the Properties of RF Magnetron Sputtered GaMgZnO UV-Range Transparent Conductive Films
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Published:2021-06-30
Issue:6
Volume:31
Page:320-324
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ISSN:1225-0562
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Container-title:Korean Journal of Materials Research
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language:
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Short-container-title:Korean. J. Mater. Res.
Author:
Patil Vijay,Lee Chesin,Lee Byung-Teak
Publisher
The Materials Research Society of Korea
Subject
General Materials Science