Characteristics of Silicon Nitride Deposited Thin Films on IT Glass by RF Magnetron Sputtering Process
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Published:2020-04-30
Issue:4
Volume:30
Page:169-175
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ISSN:1225-0562
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Container-title:Korean Journal of Materials Research
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language:
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Short-container-title:Korean. J. Mater. Res.
Author:
Son Jeongil,Kim Gwangsoo
Funder
Soonchunhyang University
Publisher
The Materials Research Society of Korea
Subject
General Materials Science