Plasma Resistance of YAS (Y2O3-Al2O3-SiO2) Coating Layer with YAG Phase Contents
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Published:2020-11-30
Issue:11
Volume:30
Page:621-626
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ISSN:1225-0562
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Container-title:Korean Journal of Materials Research
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language:
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Short-container-title:Korean. J. Mater. Res.
Author:
Park Eui Keun,Lee Hyun-Kwuon
Funder
Ministry of Trade, Industry and Energy
Publisher
The Materials Research Society of Korea
Subject
General Materials Science