Heat Treatment of Carbonized Photoresist Mask with Ammonia for Epitaxial Lateral Overgrowth of a-plane GaN on R-plane Sapphire
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Published:2018-04-30
Issue:4
Volume:28
Page:208-213
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ISSN:1225-0562
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Container-title:Korean Journal of Materials Research
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language:
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Short-container-title:Korean. J. Mater. Res.
Author:
Kim Dae-sik, ,Kwon Jun-hyuck,Jhin Junggeun,Byun Dongjin
Publisher
The Materials Research Society of Korea
Subject
General Materials Science