Electrical Conductivity Modulation in TaNx Films Grown by Plasma Enhanced Atomic Layer Deposition
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Published:2018-04-30
Issue:4
Volume:28
Page:241-246
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ISSN:1225-0562
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Container-title:Korean Journal of Materials Research
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language:
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Short-container-title:Korean. J. Mater. Res.
Author:
Ryu Sung Yeon,Choi Byung Joon
Funder
Seoul National University of Science and Technology
Publisher
The Materials Research Society of Korea
Subject
General Materials Science