Material and Structure Optimization of Substrate Support for Improving CVD Equipment Up Time
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Published:2019-11-30
Issue:11
Volume:29
Page:670-676
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ISSN:1225-0562
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Container-title:Korean Journal of Materials Research
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language:
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Short-container-title:Korean. J. Mater. Res.
Author:
Woo Ram, ,Kim Won Kyung
Publisher
The Materials Research Society of Korea
Subject
General Materials Science