Application of Femtosecond Laser Irradiation and Wet Etching in Fabrication of Microstructures in Crystal Materials
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Published:2020
Issue:11
Volume:57
Page:111419
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ISSN:1006-4125
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Container-title:Laser & Optoelectronics Progress
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language:en
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Short-container-title:激光与光电子学进展
Author:
Shen Tianlun 沈天伦,Si Jinhai 司金海,Chen Tao 陈涛,Hou Xun 侯洵
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics
Cited by
1 articles.
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