Optical calcoatings for projection objective immersion lithography
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Published:2018
Issue:5
Volume:11
Page:745-764
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ISSN:2095-1531
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Container-title:Chinese Optics
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language:en
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Short-container-title:中国光学
Author:
BI Dan-dan 毕丹丹,ZHANG Li-chao 张立超,SHI Guang 时 光
Publisher
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences
Subject
Atomic and Molecular Physics, and Optics
Cited by
2 articles.
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