Fast-Precision Measurement Method of Linear Motor Mover Position
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Published:2020
Issue:18
Volume:57
Page:181005
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ISSN:1006-4125
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Container-title:Laser & Optoelectronics Progress
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language:en
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Short-container-title:激光与光电子学进展
Author:
Fang Yuan 方媛,Zhou Yang 周杨,Zhao Jing 赵静,Gong Kaige 宫凯歌
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics