平顶飞秒激光开槽硅晶圆工艺仿真与实验研究-Reference-Cited by-同舟云学术

平顶飞秒激光开槽硅晶圆工艺仿真与实验研究

Published:2023 Issue:20 Volume:50 Page:2002202
ISSN:0258-7025
Container-title:Chinese Journal of Lasers
language:en
Short-container-title:中国激光

Author:

Zhang Zhe 张喆,Song Qi 宋琦,Zhang Kunpeng 张昆鹏,Xue Mei 薛美,Hou Yu 侯煜,Zhang Zichen 张紫辰

Publisher

Shanghai Institute of Optics and Fine Mechanics

Subject

Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference29 articles.

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2. Rational design of silicon structures for optically controlled multiscale biointerfaces;Y W Jiang;Nature Biomedical Engineering,2018

3. Microcrystalline silicon thin film deposition from silicon tetrafluoride: isolating role of ion energy using tailored voltage waveform plasmas;D Daineka;Solar Energy Materials and Solar Cells,2019

4. Experimental study on slicing photovoltaic polycrystalline silicon with diamond wire saw;Y F Gao;Materials Science in Semiconductor Processing,2020

5. Study on process parameters of fabrication fine diameter electroplated diamond wire for slicing crystalline silicon solar cell;Y F Gao;The International Journal of Advanced Manufacturing Technology,2020

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3. 超快激光加工的多尺度理论研究及耦合模型构建综述（特邀）;Chinese Journal of Lasers;2024

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