Author:
Xue Songyan 薛松岩,Hu Huace 胡化策,Xu Yinuo 徐一诺,Wang Yingchen 王莹琛,Long Jing 龙婧,Jiao Binzhang 焦玢璋,Liu Yuncheng 刘耘呈,Fan Xuhao 范旭浩,Gao Hui 高辉,Deng Leimin 邓磊敏,Xiong Wei 熊伟
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
2 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. 窄脉宽激光诱导背向选择性去除金属薄膜制备微电路（特邀）;ACTA PHOTONICA SINICA;2023
2. 介质超构表面的CMOS兼容制备工艺的进展;Acta Optica Sinica;2023