超短脉冲激光加工在微电/光互连领域的应用研究进展
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Published:2022
Issue:10
Volume:49
Page:1002502
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ISSN:0258-7025
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Container-title:Chinese Journal of Lasers
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language:en
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Short-container-title:中国激光
Author:
Sun Xiaoyan 孙小燕,Liang Chang 梁昶,Zhang Wei 张伟,Kong Dejian 孔德键,Feng Yuting 冯玉婷,Hu Youwang 胡友旺,Duan Ji’an 段吉安
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials