具有Cr阻挡层的GaAs欧姆接触工艺研究
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Published:2022
Issue:11
Volume:49
Page:1103001
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ISSN:0258-7025
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Container-title:Chinese Journal of Lasers
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language:en
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Short-container-title:中国激光
Author:
Li Bo 李博,Li Hui 李辉,Li Xiaoxue 李晓雪,Yan Hao 闫昊,Hao Yongqin 郝永芹
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials