Distortion correction for images in planar metrology-Reference-Cited by-同舟云学术

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Distortion correction for images in planar metrology

Published:2011 Issue:1 Volume:19 Page:161-167
ISSN:1004-924X
Container-title:Optics and Precision Engineering
language:en
Short-container-title:光学精密工程

Author:

SU Cheng-zhi 苏成志,WANG En-guo 王恩国,HAO Jiang-tao 郝江涛,CAO Guo-hua 曹国华,XU Hong-ji 徐洪吉

Publisher

Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences

Subject

Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

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