1. Principles of lithography;H J Levinson,2010
2. 先进光刻技术的发展历程与最新进展;李艳丽;激光与光电子学进展,2022
3. Evolution and updates of advanced photolithography technology;Y L Li;Laser & Optoelectronics Progress,2022
4. Research progress on illumination system technology of step-and-scan projection lithography tools;H J Huang;Laser & Optoelectronics Progress,2022
5. 步进扫描投影光刻机照明系统技术研究进展;刘佳红;激光与光电子学进展,2022