Microstructure Design and Preparation of CD Pattern Diffuser
-
Published:2019
Issue:21
Volume:56
Page:212201
-
ISSN:1006-4125
-
Container-title:Laser & Optoelectronics Progress
-
language:en
-
Short-container-title:激光与光电子学进展
Author:
Liu Xiaojing 刘晓静,Xu Zhimou 徐智谋,Zong Guoping 宗国平,Wang Xianyi 王先义
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics