Design of Fly-Eye Lens with Free-Form Surface Used in Parallel Light Exposure Machine with Large Area and High Uniformity
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Published:2018
Issue:4
Volume:55
Page:042201
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ISSN:1006-4125
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Container-title:Laser & Optoelectronics Progress
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language:en
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Short-container-title:激光与光电子学进展
Author:
Chen Zhongyu 陈忠雨,Yin Shaoyun 尹韶云,Sun Xiuhui 孙秀辉,Jiang Haibo 江海波,Du Chunlei 杜春雷
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics