超声气体射流辅助飞秒激光刻蚀石英微槽工艺研究
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Published:2022
Issue:11
Volume:51
Page:1114004
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ISSN:1004-4213
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Container-title:ACTA PHOTONICA SINICA
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language:en
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Short-container-title:光子学报
Author:
HE Kuikui 何魁魁,DAI Yutang 戴玉堂,YAN Chaofan 严超凡
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Atomic and Molecular Physics, and Optics