光腔衰荡法测量硅片掺杂特性的仿真和实验研究
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Published:2023
Issue:1
Volume:60
Page:0112005
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ISSN:1006-4125
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Container-title:Laser & Optoelectronics Progress
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language:en
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Short-container-title:激光与光电子学进展
Author:
Wei Chenyang 魏晨阳,Wang Qian 王谦,Hou Honglu 侯宏录
Publisher
Shanghai Institute of Optics and Fine Mechanics
Subject
Electrical and Electronic Engineering,Atomic and Molecular Physics, and Optics